DFM Metrics for Standard Cells

Research paper

Design for Manufacturability (DFM) is becoming increasingly important as process geometries shrink. Conventional design rule pass/fail is not adequate to quantify DFM compliance. Instead, metrics are needed to compare designs. Yield might be an ideal metric, but is difficult to calculate objectively without significant manufacturing data. This paper investigates the qualities that good metrics require and shows an example of an approach that seems promising.

This document is only available in a PDF version.

Copyright © 2009 ARM Limited. All rights reserved. ARM ARP0028A
Non-Confidential